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11. Comparison of the EM simulated (dashed lines) and measured (solid lines) attenuation of the realized S-CPW transmission lines. 50 Quality factor 40 30 20 W =10 mm , G=100 µm W =18 mm , G=100 µm W =18 mm , G=150 µm 10 0 0 10 20 30 40 Frequency (GHz) 50 60 Fig. 12. Comparison of the EM simulated (dashed lines) and measured (solid lines) quality factor of the S-CPW transmission lines. 4. Shielded coplanar waveguides transmission lines applications The measured results clearly show the interest of S-CPW transmission lines for achieving high quality factor and miniaturized transmission lines at millimetre-wave frequencies.

Comparison made between theoretical and measurement results over a wide frequency range up to 220 GHz evidenced the efficiency of the design method we developed as well as the accuracy of BCB technology for the design of passive function for very high frequencies. , 2006b). 5. , 2004). , 2005) demonstrate Ft of 220 GHz and Fmax of 240 GHz (Fig. , 2004). Moreover, HF noise figure is in the order of 2 dB at 40 GHz. As a consequence, from active devices point of view there is no reason to prevent the integration of millimetre-wave applications in CMOS technology.

Measurements of the transmission coefficient modulus|S21| of two stubs realized with S-CPW lines. 4. Integrated antennas and RF mm-wave interconnects Two main problems can be identified concerning communications inside integrated circuits on one hand and on the other hand concerning 3D integration and communications systems that requires integrated antennas. The main objective is to demonstrate the feasibility of such components and to take into account the specific problem linked to the mm-Wave domain.

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